Targets : in the order of the scaler
1- CD2 5.5 mg/cm2
2- CD2 0.5 mg/cm2
3- CD2 1 mg/cm2
4- mask
5- hole
6- CD2 1 mg/cm2
There are spacers to put on the target loader which height correspond each to one target position. If no spacer is used, the target is the 1st one (5.5mg/cm2). |